Abstract
Numerical analysis is conducted for the titanium-based boride and silicide nanoparticle synthesis using an induction thermal plasma including the material evaporation process and the nanoparticle growth process with nucleation and co-condensation. Both systems present the nano-scaled particle size distributions. Ti-B system shows the smaller particle diameter, sharper distribution, larger particle number density, and wider range of the composition than Ti-Si system. Ti-Si system provides a narrower range of the silicon content due to the simultaneous co-condensation of titanium and silicon. Finally the correlation between the particle size and the nonmetal content of the synthesized nanoparticles is presented on a chart.
Original language | English |
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Pages (from-to) | 4217-4227 |
Number of pages | 11 |
Journal | Thin Solid Films |
Volume | 515 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2007 Mar 12 |
Keywords
- Boride
- Nucleation
- Plasma processing and deposition
- Silicide