Multi-component co-condensation model of Ti-based boride/silicide nanoparticle growth in induction thermal plasmas

Masaya Shigeta, Takayuki Watanabe

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

Numerical analysis is conducted for the titanium-based boride and silicide nanoparticle synthesis using an induction thermal plasma including the material evaporation process and the nanoparticle growth process with nucleation and co-condensation. Both systems present the nano-scaled particle size distributions. Ti-B system shows the smaller particle diameter, sharper distribution, larger particle number density, and wider range of the composition than Ti-Si system. Ti-Si system provides a narrower range of the silicon content due to the simultaneous co-condensation of titanium and silicon. Finally the correlation between the particle size and the nonmetal content of the synthesized nanoparticles is presented on a chart.

Original languageEnglish
Pages (from-to)4217-4227
Number of pages11
JournalThin Solid Films
Volume515
Issue number9
DOIs
Publication statusPublished - 2007 Mar 12

Keywords

  • Boride
  • Nucleation
  • Plasma processing and deposition
  • Silicide

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