Abstract
We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO2 multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50 ~ 175 nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified.
Original language | English |
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Pages (from-to) | 1235-1237 |
Number of pages | 3 |
Journal | Optics Letters |
Volume | 38 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2013 Apr 15 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics