Multilayer coated microstructure for solar selective absorbers

Makoto Shimizu, Hiroki Akutsu, Shinichiro Tsuda, Kosuke Hikichi, Masafumi Kumano, Hiroo Yugami

Research output: Contribution to journalArticlepeer-review


Solar selective absorbers that function at temperatures up to 700°C and possess shallow honeycomb cylindrical microcavities coated with a metal-dielectric multi-layer are investigated. Even shallow microcavities, absorptance at solar spectrum range is largely increased due to multilayer showing spectrally selective absorption property. To obtain high spectral selective property, design strategy for the multilayer coated microstructure is established. Honeycomb array cylindrical microcavities were fabricated on tungsten substrate and multi-layers consisting of platinum nano-film sandwiched by aluminum oxide layers were created for a uniform coating via atomic layer deposition. Thermal stability of the fabricated sample at 700oC in vacuum is verified through annealing test for 100 h.

Original languageEnglish
Pages (from-to)393-399
Number of pages7
JournalIEEJ Transactions on Sensors and Micromachines
Issue number11
Publication statusPublished - 2017


  • Atomic layer deposition
  • Multilayer
  • Periodic microstructures
  • Solar selective absorbers
  • Thermal radiation


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