Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal-oxide-semiconductor capacitors

Soshi Sato; Yuki Hiroi; Kikuo Yamabe; Makoto Kitabatake; Tetsuo Endoh; Masaaki Niwa

doi:10.7567/JJAP.53.08LA01

Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal-oxide-semiconductor capacitors

Soshi Sato, Yuki Hiroi, Kikuo Yamabe, Makoto Kitabatake, Tetsuo Endoh, Masaaki Niwa

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

We observed characteristic "carpet-bombing-like concaves" after time-to-zero dielectric breakdown (TZDB) and time-dependent dielectric breakdown (TDDB) measurement for silicon carbide metal-oxide-semiconductor capacitors with a thermally grown oxide. A multiple breakdown model is proposed to explain the formation mechanism of the carpet-bombing-like concaves in TZDB measurement. Results and analysis of our TDDB measurements consistently support our multiple breakdown model.

Original language	English
Article number	08LA01
Journal	Japanese journal of applied physics
Volume	53
Issue number	8 SPEC. ISSUE 1
DOIs	https://doi.org/10.7567/JJAP.53.08LA01
Publication status	Published - 2014 Aug

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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abstract = "We observed characteristic {"}carpet-bombing-like concaves{"} after time-to-zero dielectric breakdown (TZDB) and time-dependent dielectric breakdown (TDDB) measurement for silicon carbide metal-oxide-semiconductor capacitors with a thermally grown oxide. A multiple breakdown model is proposed to explain the formation mechanism of the carpet-bombing-like concaves in TZDB measurement. Results and analysis of our TDDB measurements consistently support our multiple breakdown model.",

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year = "2014",

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T1 - Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal-oxide-semiconductor capacitors

AU - Sato, Soshi

AU - Hiroi, Yuki

AU - Yamabe, Kikuo

AU - Kitabatake, Makoto

AU - Endoh, Tetsuo

AU - Niwa, Masaaki

PY - 2014/8

Y1 - 2014/8

N2 - We observed characteristic "carpet-bombing-like concaves" after time-to-zero dielectric breakdown (TZDB) and time-dependent dielectric breakdown (TDDB) measurement for silicon carbide metal-oxide-semiconductor capacitors with a thermally grown oxide. A multiple breakdown model is proposed to explain the formation mechanism of the carpet-bombing-like concaves in TZDB measurement. Results and analysis of our TDDB measurements consistently support our multiple breakdown model.

AB - We observed characteristic "carpet-bombing-like concaves" after time-to-zero dielectric breakdown (TZDB) and time-dependent dielectric breakdown (TDDB) measurement for silicon carbide metal-oxide-semiconductor capacitors with a thermally grown oxide. A multiple breakdown model is proposed to explain the formation mechanism of the carpet-bombing-like concaves in TZDB measurement. Results and analysis of our TDDB measurements consistently support our multiple breakdown model.

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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ER -

Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal-oxide-semiconductor capacitors

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