Nano-fabrication with metallic glass - An exotic material for nano-electromechanical systems

Parmanand Sharma; Neelam Kaushik; Hisamichi Kimura; Yasunori Saotome; Akihisa Inoue

doi:10.1088/0957-4484/18/3/035302

Nano-fabrication with metallic glass - An exotic material for nano-electromechanical systems

Parmanand Sharma, Neelam Kaushik, Hisamichi Kimura, Yasunori Saotome, Akihisa Inoue

HOSP - Sense Organs and Rehabilitation Medicine

Research output: Contribution to journal › Article › peer-review

135 Citations (Scopus)

Abstract

Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (ΔT_x ≤ 95K), very smooth surface (R _a ≤ 0.2nm) and high value of Vickers hardness (H_v ≤ 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ∼12nm), as well as by the imprint lithography technique (smallest feature ∼34nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two-or three-dimensional components for future nano-electromechanical systems.

Original language	English
Article number	035302
Journal	Nanotechnology
Volume	18
Issue number	3
DOIs	https://doi.org/10.1088/0957-4484/18/3/035302
Publication status	Published - 2007 Jan 24

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abstract = "Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (ΔTx ≤ 95K), very smooth surface (R a ≤ 0.2nm) and high value of Vickers hardness (Hv ≤ 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ∼12nm), as well as by the imprint lithography technique (smallest feature ∼34nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two-or three-dimensional components for future nano-electromechanical systems.",

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AU - Sharma, Parmanand

AU - Kaushik, Neelam

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AU - Saotome, Yasunori

AU - Inoue, Akihisa

PY - 2007/1/24

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N2 - Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (ΔTx ≤ 95K), very smooth surface (R a ≤ 0.2nm) and high value of Vickers hardness (Hv ≤ 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ∼12nm), as well as by the imprint lithography technique (smallest feature ∼34nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two-or three-dimensional components for future nano-electromechanical systems.

AB - Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (ΔTx ≤ 95K), very smooth surface (R a ≤ 0.2nm) and high value of Vickers hardness (Hv ≤ 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ∼12nm), as well as by the imprint lithography technique (smallest feature ∼34nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two-or three-dimensional components for future nano-electromechanical systems.

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Nano-fabrication with metallic glass - An exotic material for nano-electromechanical systems

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