Abstract
Metallic glasses exhibit perfect Newtonian viscous flow in the supercooled liquid state and excellent micro/nano-formability under very low stresses. These alloys are therefore expected to become some of the most useful materials for fabricating nano-/micro-machines(NEMS, MEMS) and devices. The present paper introduces the fabrication technique of nano-structures by superplastic nanoforming with nano-scale die of Zr-based metallic glass fabricated by focused-ion-beam(FIB) technology and describes nano-formability of Pt-based metallic glass. Dies and the die forged l-μm-diameter micro gear, 500nm-high logo characters and 170 nm period dots for storage devices are demonstrated. Metallic glasses are highly useful as materials for nanoimprint, and as a material for FIB nanomachining.
| Original language | English |
|---|---|
| Pages (from-to) | 291-294 |
| Number of pages | 4 |
| Journal | Journal of Metastable and Nanocrystalline Materials |
| Volume | 24-25 |
| DOIs | |
| Publication status | Published - 2005 |
| Externally published | Yes |
Keywords
- Die
- FIB
- MEMS
- Metallic glass
- Microforming
- Nanoforming
- Superplasticity
ASJC Scopus subject areas
- Materials Science (miscellaneous)
- Materials Science(all)
- Condensed Matter Physics
- Physical and Theoretical Chemistry