Nanoimprinting of magnetic FeCo-based metallic glass thin films

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5 Citations (Scopus)


The ability to create submicron/nanoscale patterns with magnetic alloys at low cost is difficult. Here, we demonstrate a method to create such patterns using Fe40Co35P10C10B5 metallic glass thin films. The viscous workability of a metallic glass thin film was used to make patterns with dimensions up to ~100 nm using the nanoimprinting technique, and the effects of the patterning on the magnetic properties of the metallic glass thin films were investigated. An increase in the out-of-plane coercivity (~380 Oe) and remanent magnetization (Mr = ~12% of the saturation magnetization, Ms) were observed for amorphous thin films patterned with a high density of nano-dots. This effect was observed because of changes to the magnetic shape anisotropy induced by the nano-imprinting. Two events of magnetization reversal were confirmed in the crystalline films of the same alloy. The reversal of magnetization under the low magnetic field of ~100 Oe corresponds to soft magnetic phases, whereas that at 2400 Oe corresponds to the hard magnetic phase. Recoil curve measurements suggest that the average magnetization-switching field of hard magnetic grains in the film was between 2800 and 3600 Oe. Based on our experimental results and analysis, we suspect the presence of tetragonal Fe–Co hard/semihard magnetic phase in crystalline thin films. We believe that the low-cost and large-area micro- to nanoscale patterning ability of the present magnetic thin films are promising for the development of various magnetic MEMS and memory devices.

Original languageEnglish
Article number168455
JournalJournal of Magnetism and Magnetic Materials
Publication statusPublished - 2022 Jan 15


  • Magnetic metallic glass
  • Magnetic properties
  • Nano-molding
  • Nanoimprinting technique
  • Rare-earth free magnet
  • Thin film


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