TY - GEN
T1 - Nanoindentation hardness and elastic modulus of AlGaN alloys
AU - Tokumoto, Y.
AU - Taneichi, H.
AU - Ohno, Y.
AU - Kutsukake, K.
AU - Miyake, H.
AU - Hiramatsu, K.
AU - Yonenaga, I.
PY - 2013/10/18
Y1 - 2013/10/18
N2 - Nanoindentation hardness tests were conducted on various Al xGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x∼0.5, while the Young's modulus was ∼ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.
AB - Nanoindentation hardness tests were conducted on various Al xGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x∼0.5, while the Young's modulus was ∼ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.
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U2 - 10.1109/CLEOPR.2013.6600379
DO - 10.1109/CLEOPR.2013.6600379
M3 - Conference contribution
AN - SCOPUS:84885447139
SN - 9781467364751
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Y2 - 30 June 2013 through 4 July 2013
ER -