Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability

E. Majkova; Y. Chushkin; M. Jergel; S. Luby; V. Holy; I. Matko; B. Chenevier; L. Toth; T. Hatano; M. Yamamoto

doi:10.1016/j.tsf.2005.10.051

Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability

E. Majkova, Y. Chushkin, M. Jergel, S. Luby, V. Holy, I. Matko, B. Chenevier, L. Toth, T. Hatano, M. Yamamoto

SRIS - SR Core Research Division

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13 Citations (Scopus)

Abstract

Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4-4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3-1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25-0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 °C and a considerable decrease of reflectivity followed above 300 °C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.

Original language	English
Pages (from-to)	115-120
Number of pages	6
Journal	Thin Solid Films
Volume	497
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2005.10.051
Publication status	Published - 2006 Feb 21

Keywords

Grazing incidence X-ray scattering
Interface roughness
Multilayers
Thermal stability

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10.1016/j.tsf.2005.10.051

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@article{a727fad4f3a3438288cbb2fd352cddeb,

title = "Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability",

abstract = "Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4-4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3-1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25-0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 °C and a considerable decrease of reflectivity followed above 300 °C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.",

keywords = "Grazing incidence X-ray scattering, Interface roughness, Multilayers, Thermal stability",

author = "E. Majkova and Y. Chushkin and M. Jergel and S. Luby and V. Holy and I. Matko and B. Chenevier and L. Toth and T. Hatano and M. Yamamoto",

note = "Funding Information: The work was supported by Slovak Grant Agency VEGA, Bratislava under the grant 2/3149/24and by the Governmental project: New materials and devices in submicron technology 2003 SO 51/03R 06 00/03R 06 01 and by Slovak Academy of Sciences within Center of Excellence – Physics of Information under the contract I/2/2005. The support of Japan Society for the Promotion of Sciences (RC 20428001) is acknowledged by E.M. Authors thank to E. Gullikson for providing the data file of soft X-ray reflectivity [Ref. 10 ] for our analysis.",

year = "2006",

month = feb,

day = "21",

doi = "10.1016/j.tsf.2005.10.051",

language = "English",

volume = "497",

pages = "115--120",

journal = "Thin Solid Films",

issn = "0040-6090",

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T1 - Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability

AU - Majkova, E.

AU - Chushkin, Y.

AU - Jergel, M.

AU - Luby, S.

AU - Holy, V.

AU - Matko, I.

AU - Chenevier, B.

AU - Toth, L.

AU - Hatano, T.

AU - Yamamoto, M.

N1 - Funding Information: The work was supported by Slovak Grant Agency VEGA, Bratislava under the grant 2/3149/24and by the Governmental project: New materials and devices in submicron technology 2003 SO 51/03R 06 00/03R 06 01 and by Slovak Academy of Sciences within Center of Excellence – Physics of Information under the contract I/2/2005. The support of Japan Society for the Promotion of Sciences (RC 20428001) is acknowledged by E.M. Authors thank to E. Gullikson for providing the data file of soft X-ray reflectivity [Ref. 10 ] for our analysis.

PY - 2006/2/21

Y1 - 2006/2/21

N2 - Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4-4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3-1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25-0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 °C and a considerable decrease of reflectivity followed above 300 °C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.

AB - Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4-4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3-1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25-0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 °C and a considerable decrease of reflectivity followed above 300 °C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.

KW - Grazing incidence X-ray scattering

KW - Interface roughness

KW - Multilayers

KW - Thermal stability

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U2 - 10.1016/j.tsf.2005.10.051

DO - 10.1016/j.tsf.2005.10.051

M3 - Article

AN - SCOPUS:30344447987

SN - 0040-6090

VL - 497

SP - 115

EP - 120

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability

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Keywords

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