Abstract
Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. Microforming techniques are shown as follows; microextrusion with micro-dies made of photochemically machinable glass and made of laser-micromachined polyimide, submicron imprinting with silicon die fabricated by EB lithography and etching, microforging of microgear of 10 μm in module with microdie fabricated by UV-LIGA process. As a result, the materials are expected to become some of the most useful materials for fabricating MEMS.
| Original language | English |
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| Pages | 288-293 |
| Number of pages | 6 |
| Publication status | Published - 2000 Jan 1 |
| Event | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: 2000 Jan 23 → 2000 Jan 27 |
Other
| Other | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) |
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| City | Miyazaki, Jpn |
| Period | 00/1/23 → 00/1/27 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering