TY - JOUR
T1 - New functions of scanning nonlinear dielectric microscopy - Higher-order measurement and vertical resolution
AU - Cho, Y.
AU - Ohara, K.
AU - Koike, A.
AU - Odagawa, H.
PY - 2001/5
Y1 - 2001/5
N2 - We investigated new features (functions) of scanning nonlinear dielectric microscopy (SNDM), namely, higher-order nonlinear dielectric imaging and the very high vertical resolution. The resolution of the higher-order nonlinear dielectric imaging is higher than that of the conventional nonlinear dielectric imaging which detects the lowest order of the nonlinear dielectric constant. The very high vertical resolution of SNDM is also reported. These features of the SNDM enable us to obtain a new microscopy for measuring the topography or a new displacement sensor with extremely high sensitivity.
AB - We investigated new features (functions) of scanning nonlinear dielectric microscopy (SNDM), namely, higher-order nonlinear dielectric imaging and the very high vertical resolution. The resolution of the higher-order nonlinear dielectric imaging is higher than that of the conventional nonlinear dielectric imaging which detects the lowest order of the nonlinear dielectric constant. The very high vertical resolution of SNDM is also reported. These features of the SNDM enable us to obtain a new microscopy for measuring the topography or a new displacement sensor with extremely high sensitivity.
KW - Nonlinear dielectric constant
KW - Scanning nonlinear dielectric microscopy
KW - Scanning probe microscopy
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U2 - 10.1143/jjap.40.3544
DO - 10.1143/jjap.40.3544
M3 - Article
AN - SCOPUS:0035327801
SN - 0021-4922
VL - 40
SP - 3544
EP - 3548
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 5 B
ER -