KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ = 0.24 (λ:SAW wavelength, h:film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.
|Number of pages||4|
|Publication status||Published - 1998|
|Event||Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz|
Duration: 1998 Aug 24 → 1998 Aug 27
|Conference||Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)|
|Period||98/8/24 → 98/8/27|