New piezoelectric KNbO3 films for SAW device applications

K. Yamanouchi; H. Odagawa; T. Kojima; Y. Cho

New piezoelectric KNbO₃ films for SAW device applications

K. Yamanouchi, H. Odagawa, T. Kojima, Y. Cho

New Industry Creation Hatchery Center (NICHe)

Tohoku University

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

KNbO₃ films have been deposited on STO (SrTiO₃) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K²) of 0.021 at the center frequency of 960 MHz and h/λ = 0.24 (λ:SAW wavelength, h:film thickness of KNbO₃). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

Original language	English
Pages	385-388
Number of pages	4
Publication status	Published - 1998
Event	Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz Duration: 1998 Aug 24 → 1998 Aug 27

Conference

Conference	Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)
City	Montreaux, Switz
Period	98/8/24 → 98/8/27

Cite this

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title = "New piezoelectric KNbO3 films for SAW device applications",

abstract = "KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ = 0.24 (λ:SAW wavelength, h:film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.",

author = "K. Yamanouchi and H. Odagawa and T. Kojima and Y. Cho",

year = "1998",

language = "English",

pages = "385--388",

note = "Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) ; Conference date: 24-08-1998 Through 27-08-1998",

}

TY - CONF

T1 - New piezoelectric KNbO3 films for SAW device applications

AU - Yamanouchi, K.

AU - Odagawa, H.

AU - Kojima, T.

AU - Cho, Y.

PY - 1998

Y1 - 1998

N2 - KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ = 0.24 (λ:SAW wavelength, h:film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

AB - KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ = 0.24 (λ:SAW wavelength, h:film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

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M3 - Paper

AN - SCOPUS:0032264966

SP - 385

EP - 388

T2 - Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)

Y2 - 24 August 1998 through 27 August 1998

ER -

New piezoelectric KNbO₃ films for SAW device applications

Abstract

Conference

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