Fabrication of insulating barrier in ferromagnetic tunnel junctions was carried out using new plasma source. The tunneling barrier is the most improtant factor for magnetic tunnel junctions (MTJ). The results showed that loosely bonded oxygen in as-deposited MTJ easily diffuse in the barrier layer to form a tightly bonded stoichiometric Al2O3 during thermal annealing.
|Journal||Digests of the Intermag Conference|
|Publication status||Published - 2002|
|Event||2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands|
Duration: 2002 Apr 28 → 2002 May 2