New structural design of micro-thermoelectric sensor for wide range hydrogen detection

Maiko Nishibori; Woosuck Shin; Lionel F. Houlet; Kazuki Tajima; Toshio Itoh; Noriya Izu; Norimitsu Murayama; Ichiro Matsubara

doi:10.2109/jcersj.114.853

New structural design of micro-thermoelectric sensor for wide range hydrogen detection

Maiko Nishibori, Woosuck Shin, Lionel F. Houlet, Kazuki Tajima, Toshio Itoh, Noriya Izu, Norimitsu Murayama, Ichiro Matsubara

SRIS - SR Core Research Division

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

Abstract

Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm² chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H₂ concentration in air from low as 0.5 ppm to high as 5 vol%.

Original language	English
Pages (from-to)	853-856
Number of pages	4
Journal	Journal of the Ceramic Society of Japan
Volume	114
Issue number	1334
DOIs	https://doi.org/10.2109/jcersj.114.853
Publication status	Published - 2006

Keywords

Ceramic catalyst
Hydrogen sensor
SiGe
Thermoelectric
Wide range

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10.2109/jcersj.114.853

Cite this

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abstract = "Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%.",

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AU - Nishibori, Maiko

AU - Shin, Woosuck

AU - Houlet, Lionel F.

AU - Tajima, Kazuki

AU - Itoh, Toshio

AU - Izu, Noriya

AU - Murayama, Norimitsu

AU - Matsubara, Ichiro

PY - 2006

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AB - Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%.

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KW - Hydrogen sensor

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KW - Thermoelectric

KW - Wide range

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New structural design of micro-thermoelectric sensor for wide range hydrogen detection

Abstract

Keywords

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