NO gas sensor based on surface photovoltage system fabricated by self-ordered hexagonal mesoporous silicate film

Hao Shen Zhou; Takeo Yamada; Keisuke Asai; Itaru Honma; Hidekazu Uchida; Teruaki Ka

doi:10.1143/jjap.40.7098

NO gas sensor based on surface photovoltage system fabricated by self-ordered hexagonal mesoporous silicate film

Hao Shen Zhou, Takeo Yamada, Keisuke Asai, Itaru Honma, Hidekazu Uchida, Teruaki Ka

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

The first reported NO gas sensor based on a surface photovoltage (SPV) semiconductor device system is fabricated with a metal/SiO₂ (self-ordered hexagonal mesoporous)/Si₃N₄/SiO₂/Si structure (MIS). A size controlled silicate mesoporous film is successfully synthesized by spin coating on a Si₃N₄/SiO₂/Si silicon wafer using poly(ethylene oxide)-poly(propyle oxide)-poly(ethylene oxide) (Pluronic P123 = EO₂₀PO₇₀EO₂₀) triblock copolymers as a template. The characteristics of the mesoporous films were investigated by X-ray diffraction (XRD) and transmission electron microscope (TEM). The sensing properties of the self-ordered hexagonal mesoporous SPV system have been investigated by repeated exposure to NO gas and air. The changes in the average value and phase of the AC photocurrent (I_ph) have been observed after exposure of the films to 100 ppm NO gas. The response of the alternative photocurrent results from the physical adsorption and chemical interaction between detected NO gases and the self-ordered hexagonal mesoporous film.

Original language	English
Pages (from-to)	7098-7102
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	40
Issue number	12
DOIs	https://doi.org/10.1143/jjap.40.7098
Publication status	Published - 2001 Dec
Externally published	Yes

Keywords

Gas sensor
Mesoporous
Mesostructure
Ordered and aligned pore
Pluronic P123
Size control

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.40.7098

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NO gas sensor based on surface photovoltage system fabricated by self-ordered hexagonal mesoporous silicate film. / Zhou, Hao Shen; Yamada, Takeo; Asai, Keisuke et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 40, No. 12, 12.2001, p. 7098-7102.

Research output: Contribution to journal › Article › peer-review

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NO gas sensor based on surface photovoltage system fabricated by self-ordered hexagonal mesoporous silicate film

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Keywords

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