Noise-enhanced sensing of light and magnetic force based on a nonlinear silicon microresonator

Takahito Ono, Yusuke Yoshida, Yong Gang Jiang, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Microresonators with mechanical nonlinearity are applied to sensing based on the noise-enhanced stochastic transition of the vibration amplitude in bistable mechanical systems at resonance. Noise-enhanced stochastic transitions can amplify a signal in a nonlinear system. It was found that 100-nm-thick single-crystalline silicon resonators exhibit mechanical nonlinearity with both negative and positive nonlinear coefficients, depending on the vibration frequency at large vibration amplitudes. It was demonstrated that the noise-enhanced stochastic transition can be synchronized with periodic optical stimuli with in-phase or anti-phase, depending on the operation frequency. In addition, the detection of a magnetic field was demonstrated using a resonator with a micromagnet on the basis of noise-enhanced transitions.

Original languageEnglish
Pages (from-to)1230011-1230013
Number of pages3
JournalApplied Physics Express
Issue number12
Publication statusPublished - 2008 Dec


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