Non-contact evaluation of the electrical conductivity of thin metallic films by eddy current microscopy

Hironori Tohmyoh, Shoho Ishikawa, Mikio Muraoka

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


An eddy current microscopy technique to evaluate the electrical conductivity of thin metallic films in a non-contact manner is reported. A narrow track formed in an approximately 100 nm thick Au film was prepared, and a Co-Cr coated magnetic tip was driven to oscillate above the track both with and without current passing through the track. Despite the absence of current, the electromagnetic interaction between the tip and the stray magnetic field from the track gave rise to a phase delay in the probe. This was due to an eddy current being induced within part of the track. Moreover, measurements of the phase change in the probe oscillation for different metallic films with thicknesses of about 100 nm found this to be proportional to the electrical conductivity of the film. Finally, the electrical conductivity of an Al film was evaluated using the eddy current microscopy technique.

Original languageEnglish
Pages (from-to)1294-1298
Number of pages5
JournalSurface and Interface Analysis
Issue number9
Publication statusPublished - 2012 Sept


  • eddy current
  • electrical conductivity
  • magnetic force microscopy
  • non-contact measurement
  • thin film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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