TY - JOUR
T1 - Non-uniform Excitation States in Photoinduced Deformation of Amorphous Carbon Nitride Films
AU - Aono, Masami
AU - Harata, Tomo
AU - Kitazawa, Nobuaki
AU - Abe, Hiroshi
AU - Ishii, Shingo
AU - Sato, Yohei
AU - Terauchi, Masami
N1 - Funding Information:
The authors would like to thank Dr. Hisashi Miyazaki in National Defense Academy for fruitful discussions regarding the electrical states in a-CNx films and Dr. Yosuke Shimamune and Prof. Hironori Katagiri in Nagaoka National College of Technology for supporting AFM measurement. XRR study was performed in the X-ray Research Laboratory of Rigaku Corporation. The authors would like to thank Mr. S. Kobayashi’s assistance for the XRR measurement. PEN films were provided by Teijin DuPont Films Japan Ltd. This work was supported by JSPS KAKENHI Grant Number 18H01715. A part of this work was performed under the Cooperative Research Program of “Network Joint Research Center for Materials and Devices”.
Publisher Copyright:
© 2018, The Author(s).
PY - 2018/12/1
Y1 - 2018/12/1
N2 - Amorphous carbon nitride (a-CNx) films prepared via reactive radio frequency magnetron sputtering deform under on–off visible light illumination. We investigate the relationship between photoinduced deformation and surface electrical states via scanning electron microscopy with Ar+ laser irradiation (SEM-L). Two samples with different levels of photoinduced deformation are prepared. For the film with small photoinduced deformation, uniform secondary electron emission is observed on the film surface, regardless of whether the laser is on or off. On the a-CNx film, which has fifty times larger photoinduced deformation than the previous film, light and dark patches, similar to a speckle pattern, appear on the film surface in SEM-L images. This anomalous phenomenon indicates non-uniformity of the electrical states excited by laser light irradiation. A size of the patches is well correlated with an inhomogeneous distribution of sp3C and sp2C, Isp3C/Isp2C, obtained using soft X-ray emission spectroscopy (SXES). Simultaneously, temporal decrease in the sp3C component under illumination is obtained via SXES.
AB - Amorphous carbon nitride (a-CNx) films prepared via reactive radio frequency magnetron sputtering deform under on–off visible light illumination. We investigate the relationship between photoinduced deformation and surface electrical states via scanning electron microscopy with Ar+ laser irradiation (SEM-L). Two samples with different levels of photoinduced deformation are prepared. For the film with small photoinduced deformation, uniform secondary electron emission is observed on the film surface, regardless of whether the laser is on or off. On the a-CNx film, which has fifty times larger photoinduced deformation than the previous film, light and dark patches, similar to a speckle pattern, appear on the film surface in SEM-L images. This anomalous phenomenon indicates non-uniformity of the electrical states excited by laser light irradiation. A size of the patches is well correlated with an inhomogeneous distribution of sp3C and sp2C, Isp3C/Isp2C, obtained using soft X-ray emission spectroscopy (SXES). Simultaneously, temporal decrease in the sp3C component under illumination is obtained via SXES.
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U2 - 10.1038/s41598-018-33364-4
DO - 10.1038/s41598-018-33364-4
M3 - Article
C2 - 30305691
AN - SCOPUS:85054671863
SN - 2045-2322
VL - 8
JO - Scientific Reports
JF - Scientific Reports
IS - 1
M1 - 15066
ER -