Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida; Yosuke Hagihara; Shuji Tanaka; Masayoshi Esashi

Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida, Yosuke Hagihara, Shuji Tanaka, Masayoshi Esashi

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Citations (Scopus)

Abstract

This paper describes an electrostatic micro valve which controls fuel in a portable direct methanol fuel cell (DMFC) system under development. A novel pressure balance mechanism is adopted to achieve both normally-closed operation against pressurized fuel and low voltage operation. The fabricated micro valve was tested using air as a working fluid in terms of leak pressure and driving voltage. The micro valve kept close state at input pressure from 0 kPa to 20 kPa. The driving voltage to fully open the micro valve was from 30 V to 60 V. These results well agree with the theoretical estimation.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	722-725
Number of pages	4
Publication status	Published - 2006
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2006
ISSN (Print)	1084-6999

Conference

Conference	19th IEEE International Conference on Micro Electro Mechanical Systems
Country/Territory	Turkey
City	Istanbul
Period	06/1/22 → 06/1/26

Cite this

Yoshida, K., Hagihara, Y., Tanaka, S., & Esashi, M. (2006). Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 722-725). Article 1627901 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

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title = "Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application",

abstract = "This paper describes an electrostatic micro valve which controls fuel in a portable direct methanol fuel cell (DMFC) system under development. A novel pressure balance mechanism is adopted to achieve both normally-closed operation against pressurized fuel and low voltage operation. The fabricated micro valve was tested using air as a working fluid in terms of leak pressure and driving voltage. The micro valve kept close state at input pressure from 0 kPa to 20 kPa. The driving voltage to fully open the micro valve was from 30 V to 60 V. These results well agree with the theoretical estimation.",

author = "Kazushi Yoshida and Yosuke Hagihara and Shuji Tanaka and Masayoshi Esashi",

note = "Funding Information: This work was supported by the New Energy and Industrial Technology Development Organization (NEDO) of Japan. ; 19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",

year = "2006",

language = "English",

isbn = "0780394755",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "722--725",

booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",

}

Yoshida, K, Hagihara, Y, Tanaka, S & Esashi, M 2006, Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627901, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 722-725, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application. / Yoshida, Kazushi; Hagihara, Yosuke; Tanaka, Shuji et al.
19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 722-725 1627901 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application

AU - Yoshida, Kazushi

AU - Hagihara, Yosuke

AU - Tanaka, Shuji

AU - Esashi, Masayoshi

N1 - Funding Information: This work was supported by the New Energy and Industrial Technology Development Organization (NEDO) of Japan.

PY - 2006

Y1 - 2006

N2 - This paper describes an electrostatic micro valve which controls fuel in a portable direct methanol fuel cell (DMFC) system under development. A novel pressure balance mechanism is adopted to achieve both normally-closed operation against pressurized fuel and low voltage operation. The fabricated micro valve was tested using air as a working fluid in terms of leak pressure and driving voltage. The micro valve kept close state at input pressure from 0 kPa to 20 kPa. The driving voltage to fully open the micro valve was from 30 V to 60 V. These results well agree with the theoretical estimation.

AB - This paper describes an electrostatic micro valve which controls fuel in a portable direct methanol fuel cell (DMFC) system under development. A novel pressure balance mechanism is adopted to achieve both normally-closed operation against pressurized fuel and low voltage operation. The fabricated micro valve was tested using air as a working fluid in terms of leak pressure and driving voltage. The micro valve kept close state at input pressure from 0 kPa to 20 kPa. The driving voltage to fully open the micro valve was from 30 V to 60 V. These results well agree with the theoretical estimation.

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UR - http://www.scopus.com/inward/citedby.url?scp=33750108620&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33750108620

SN - 0780394755

SN - 9780780394759

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 722

EP - 725

BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 22 January 2006 through 26 January 2006

ER -

Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application

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