Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi; Shuichi Shoji; Akira Nakano

doi:10.1016/0250-6874(89)87114-8

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

125 Citations (Scopus)

Abstract

A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm². The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH₂O respectively.

Original language	English
Pages (from-to)	163-169
Number of pages	7
Journal	Sensors and Actuators
Volume	20
Issue number	1-2
DOIs	https://doi.org/10.1016/0250-6874(89)87114-8
Publication status	Published - 1989 Nov 15

ASJC Scopus subject areas

Engineering(all)

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abstract = "A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.",

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AU - Shoji, Shuichi

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N2 - A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

AB - A normally closed microvalve and a micropump are fabricated on a silicon wafer by micro-machining techniques. The normally closed microvalve has a movable silicon diaphragm and a small piezoactuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm2. The micropump is a diaphragm-type pump, which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoactuator. The maximum pumping flow rate and pressure are 20 μ/min and 780 mmH2O respectively.

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Normally closed microvalve and mircopump fabricated on a silicon wafer

Abstract

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