Novel design for optical scanner with piezoelectric film deposited by metal organic chemical vapor deposition

A two-dimensional (2D) optical micro mirror scanner with piezoelectric film deposited by metal organic chemical vapor deposition (MOCVD) was designed, fabricated, and evaluated. The overall area of the device is 2:5 × 2:5mm² and the mirror diameter is 1 mm. A small footprint device compared with the mirror size was realized. The piezoelectric film was deposited using a semi-homemade MOCVD apparatus. The device was fabricated by a micro fabrication technique with simple three mask processes. The optical scanning angles of torsional and bending rotations are, respectively, 17 and 16̊ at 20 Vp_p-p with a 1.6-μm-thick lead zirconate titanate (PZT) film and a 20-μm-thick Si structure in atmospheric ambient. The resonant frequencies of torsional rotation mode and bending rotation mode are, respectively, 15 and 10 kHz. The laser beam scanning of an unclosed Lissajous figure can scan all the pixel points on a 2D image frame within a certain time interval. The small 2D scanner is expected to be suitable for the mass production of portable optical devices.