Novel process for surface treatment of AlN - High-temperature oxidation behavior of AlN

In order to understand fundamental mechanism of oxidation of aluminum nitride (AlN) and develop a new surface treatment forming a protective oxide scale on AlN, the oxidation behavior of AlN powder has been studied in an oxygen or oxygen/nitrogen atmosphere by thermogravimetry-differcntial thermal analysis and in-situ x-ray diffractometry. In the initial stage of heating AlM, oxygen mostly dissolves into AlN, When the temperature reaches a threshold temperature, an abrupt oxidation occurred. The mechanism of the abrupt oxidation is discussed in association with the dissolved oxygen. On the basis of the results and discussion, a new surface treatment is proposed to form a crack-free protective oxide scale on AlN.