TY - JOUR
T1 - Observation of a microwave bandgap in a one-dimensionally periodic low-pressure plasma structure
AU - Takahashi, Kazunori
AU - Miyamoto, Kazuaki
PY - 2013
Y1 - 2013
N2 - One-dimensionally periodic structure of plasma density is produced by a 400 kHz capacitively coupled discharge in 15 Pa argon. The maximum density can be increased up to above 1010-1011 cm-3 by increasing the rf power. The density ratio between the higher and lower density layers is maintained at about 0.7 in the present configuration. The transmittance of the microwave in the GHz range is measured and simply calculated. The results indicate the presence of the bandgap near about 3 GHz, which originates in the periodic structure.
AB - One-dimensionally periodic structure of plasma density is produced by a 400 kHz capacitively coupled discharge in 15 Pa argon. The maximum density can be increased up to above 1010-1011 cm-3 by increasing the rf power. The density ratio between the higher and lower density layers is maintained at about 0.7 in the present configuration. The transmittance of the microwave in the GHz range is measured and simply calculated. The results indicate the presence of the bandgap near about 3 GHz, which originates in the periodic structure.
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U2 - 10.1088/1742-6596/441/1/012011
DO - 10.1088/1742-6596/441/1/012011
M3 - Conference article
AN - SCOPUS:84881032833
SN - 1742-6588
VL - 441
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012011
T2 - 11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012
Y2 - 2 October 2012 through 5 October 2012
ER -