Observation of ferroelectric polarization in KNbO3 thin films and surface acoustic wave properties

Hiroyuki Odagawa; Kenji Kotani; Yasuo Cho; Kazuhiko Yamanouchi

doi:10.1143/jjap.38.3275

Observation of ferroelectric polarization in KNbO₃ thin films and surface acoustic wave properties

Hiroyuki Odagawa, Kenji Kotani, Yasuo Cho, Kazuhiko Yamanouchi

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

In this paper, the properties of KNbO₃ films, which are deposited on SrTiO₃ (STO) substrate using the metal organic chemical vapor deposition (MOCVD) method, are investigated for surface acoustic wave (SAW) applications. As-grown KNbO₃ films on STO substrates are sufficiently piezoelectric. The experimental results show an electromechanical coupling coefficient (k²) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λSAW wavelength, hKNbO₃ film thickness). These values show fairly good agreement with theoretical ones calculated by using the piezoelectric constants of single crystals. The ferroelectric polarization distribution of KNbO₃ films is also measured using a scanning nonlinear dielectric microscope. The result shows that the polarizations of the as-grown film are in the same positive direction along the surface normal.

Original language	English
Pages (from-to)	3275-3278
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	38
Issue number	5 B
DOIs	https://doi.org/10.1143/jjap.38.3275
Publication status	Published - 1999

Keywords

Ferroelectric polarization
KNbO thin film
Scanning nonlinear dielectric microscope
Superhigh electromechanical coupling
Surface acoustic wave

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/jjap.38.3275

Cite this

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title = "Observation of ferroelectric polarization in KNbO3 thin films and surface acoustic wave properties",

abstract = "In this paper, the properties of KNbO3 films, which are deposited on SrTiO3 (STO) substrate using the metal organic chemical vapor deposition (MOCVD) method, are investigated for surface acoustic wave (SAW) applications. As-grown KNbO3 films on STO substrates are sufficiently piezoelectric. The experimental results show an electromechanical coupling coefficient (k2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λSAW wavelength, hKNbO3 film thickness). These values show fairly good agreement with theoretical ones calculated by using the piezoelectric constants of single crystals. The ferroelectric polarization distribution of KNbO3 films is also measured using a scanning nonlinear dielectric microscope. The result shows that the polarizations of the as-grown film are in the same positive direction along the surface normal.",

keywords = "Ferroelectric polarization, KNbO thin film, Scanning nonlinear dielectric microscope, Superhigh electromechanical coupling, Surface acoustic wave",

author = "Hiroyuki Odagawa and Kenji Kotani and Yasuo Cho and Kazuhiko Yamanouchi",

year = "1999",

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language = "English",

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journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

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T1 - Observation of ferroelectric polarization in KNbO3 thin films and surface acoustic wave properties

AU - Odagawa, Hiroyuki

AU - Kotani, Kenji

AU - Cho, Yasuo

AU - Yamanouchi, Kazuhiko

PY - 1999

Y1 - 1999

N2 - In this paper, the properties of KNbO3 films, which are deposited on SrTiO3 (STO) substrate using the metal organic chemical vapor deposition (MOCVD) method, are investigated for surface acoustic wave (SAW) applications. As-grown KNbO3 films on STO substrates are sufficiently piezoelectric. The experimental results show an electromechanical coupling coefficient (k2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λSAW wavelength, hKNbO3 film thickness). These values show fairly good agreement with theoretical ones calculated by using the piezoelectric constants of single crystals. The ferroelectric polarization distribution of KNbO3 films is also measured using a scanning nonlinear dielectric microscope. The result shows that the polarizations of the as-grown film are in the same positive direction along the surface normal.

AB - In this paper, the properties of KNbO3 films, which are deposited on SrTiO3 (STO) substrate using the metal organic chemical vapor deposition (MOCVD) method, are investigated for surface acoustic wave (SAW) applications. As-grown KNbO3 films on STO substrates are sufficiently piezoelectric. The experimental results show an electromechanical coupling coefficient (k2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λSAW wavelength, hKNbO3 film thickness). These values show fairly good agreement with theoretical ones calculated by using the piezoelectric constants of single crystals. The ferroelectric polarization distribution of KNbO3 films is also measured using a scanning nonlinear dielectric microscope. The result shows that the polarizations of the as-grown film are in the same positive direction along the surface normal.

KW - Ferroelectric polarization

KW - KNbO thin film

KW - Scanning nonlinear dielectric microscope

KW - Superhigh electromechanical coupling

KW - Surface acoustic wave

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