Abstract
A new type of scanning nonlinear dielectric microscope (SNDM), with an additional function of simultaneous observation of surface morphology, is developed. This is achieved by using an electrically conducting atomic force microscopy cantilever as a probe needle. Using this new SNDM, simultaneous measurements of several ferroelectric materials, such as thin films of PZT on SrTiO3 substrates, are performed. Topographic and domain images, which are simultaneously taken from the same location of the materials, are successfully obtained. The result shows that nano-sized ferroelectric domain images for PZT thin film having a good correlation with a topographic image were observed. Moreover, we demonstrate that SNDM can measure the crystal polarity of a thin film deposited on a polar substrate without the influence of the substrate polarity.
Original language | English |
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Pages (from-to) | 917/225-926/234 |
Journal | Integrated Ferroelectrics |
Volume | 32 |
Issue number | 1-4 |
Publication status | Published - 2001 |
Event | 12th International Symposium on Integrated Ferroelectrics - Aachen, Germany Duration: 2000 Mar 12 → 2000 Mar 15 |
Keywords
- Atomic force microscope
- Determination of crystal polarity
- Ferroelectric materials
- Scanning nonlinear dielectric microscopy
- ZnO thin film