Observation of stationary plasma striation and collimated plasma transport in a 100-khz inductively coupled plasma discharge

Kazunori Takahashi; Akira Ando

doi:10.1109/TPS.2014.2308893

Observation of stationary plasma striation and collimated plasma transport in a 100-khz inductively coupled plasma discharge

Kazunori Takahashi, Akira Ando

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Inductively coupled plasma source connected to a diffusion vacuum chamber is operated with an inverter-type radio frequency (RF) power supply in 10-Pa argon. Plasma structure in the glass source tube is preliminarily studied by acquisition of digital images. A RF antenna is powered with a frequency of {\sim}{\rm 100}~{\rm kHz} , which is adjusted in order to optimize impedance matching condition. Near the RF antenna, the plasma production over the glass source tube diameter is observed, whereas the smaller diameter plasma transport and the stationary plasma striation structure are seen between the RF antenna and diffusion chamber.

Original language	English
Article number	6767121
Pages (from-to)	2784-2785
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	42
Issue number	10
DOIs	https://doi.org/10.1109/TPS.2014.2308893
Publication status	Published - 2014 Oct 1

Keywords

ICP plasma
inverter power supply
plasma striation.

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10.1109/TPS.2014.2308893

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title = "Observation of stationary plasma striation and collimated plasma transport in a 100-khz inductively coupled plasma discharge",

abstract = "Inductively coupled plasma source connected to a diffusion vacuum chamber is operated with an inverter-type radio frequency (RF) power supply in 10-Pa argon. Plasma structure in the glass source tube is preliminarily studied by acquisition of digital images. A RF antenna is powered with a frequency of {\sim}{\rm 100}~{\rm kHz} , which is adjusted in order to optimize impedance matching condition. Near the RF antenna, the plasma production over the glass source tube diameter is observed, whereas the smaller diameter plasma transport and the stationary plasma striation structure are seen between the RF antenna and diffusion chamber.",

keywords = "ICP plasma, inverter power supply, plasma striation.",

author = "Kazunori Takahashi and Akira Ando",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.",

year = "2014",

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T1 - Observation of stationary plasma striation and collimated plasma transport in a 100-khz inductively coupled plasma discharge

AU - Takahashi, Kazunori

AU - Ando, Akira

PY - 2014/10/1

Y1 - 2014/10/1

N2 - Inductively coupled plasma source connected to a diffusion vacuum chamber is operated with an inverter-type radio frequency (RF) power supply in 10-Pa argon. Plasma structure in the glass source tube is preliminarily studied by acquisition of digital images. A RF antenna is powered with a frequency of {\sim}{\rm 100}~{\rm kHz} , which is adjusted in order to optimize impedance matching condition. Near the RF antenna, the plasma production over the glass source tube diameter is observed, whereas the smaller diameter plasma transport and the stationary plasma striation structure are seen between the RF antenna and diffusion chamber.

AB - Inductively coupled plasma source connected to a diffusion vacuum chamber is operated with an inverter-type radio frequency (RF) power supply in 10-Pa argon. Plasma structure in the glass source tube is preliminarily studied by acquisition of digital images. A RF antenna is powered with a frequency of {\sim}{\rm 100}~{\rm kHz} , which is adjusted in order to optimize impedance matching condition. Near the RF antenna, the plasma production over the glass source tube diameter is observed, whereas the smaller diameter plasma transport and the stationary plasma striation structure are seen between the RF antenna and diffusion chamber.

KW - ICP plasma

KW - inverter power supply

KW - plasma striation.

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JF - IEEE Transactions on Plasma Science

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M1 - 6767121

ER -

Observation of stationary plasma striation and collimated plasma transport in a 100-khz inductively coupled plasma discharge

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Keywords

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