@article{02c79c06da404191abc9e5885281f6a9,
title = "On-machine and in-process surface metrology for precision manufacturing",
abstract = "On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.",
keywords = "Manufacturing, Metrology, Surface",
author = "W. Gao and H. Haitjema and Fang, {F. Z.} and Leach, {R. K.} and Cheung, {C. F.} and E. Savio and Linares, {J. M.}",
note = "Funding Information: The fruitful discussions and suggestions from many colleagues in CIRP STCs P and S are appreciated. H. Martin and X. Jiang of Huddersfield University read and commented on the manuscript. D.W. Kim of Arizona University, L.C. Chen of NTU, S. Shirakawa of Heidenhain KK, K. Taknaka and M. Fukuda of Toshiba Machine, M. Tano of JTEKT, Y. Nagaike of Olympus, K. Kamiya of Toyama Prefectural University, G. Chapman of Moore Nanotech, H. Ogawa of Enable KK, A. Archenti and K. Szipka of KTH, R. Mayer of Polytechnique Montreal, B. Philip of ETH Zurich, R. Sato of Kobe University, S. Ibaraki of Hiroshima University, H. Yamashita of Captain Industries, L. Asanuma of M & J, K. Oi of Keyence, E. Saito of Renishaw KK, S. Nishikawa of DMG Mori, X.D Zhang of Tianjin University provided valuable information. W. Gao thanks the significant contribution from Y.L. Chen and the support from JSPS. Publisher Copyright: {\textcopyright} 2019 CIRP",
year = "2019",
doi = "10.1016/j.cirp.2019.05.005",
language = "English",
volume = "68",
pages = "843--866",
journal = "CIRP Annals - Manufacturing Technology",
issn = "0007-8506",
publisher = "Elsevier USA",
number = "2",
}