On-machine and in-process surface metrology for precision manufacturing

W. Gao, H. Haitjema, F. Z. Fang, R. K. Leach, C. F. Cheung, E. Savio, J. M. Linares

Research output: Contribution to journalArticlepeer-review

241 Citations (Scopus)


On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

Original languageEnglish
Pages (from-to)843-866
Number of pages24
JournalCIRP Annals - Manufacturing Technology
Issue number2
Publication statusPublished - 2019


  • Manufacturing
  • Metrology
  • Surface


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