TY - JOUR
T1 - On the origin and elimination of macroscopic defects in MBE films
AU - Wood, C. E.C.
AU - Rathbun, L.
AU - Ohno, H.
AU - DeSimone, D.
N1 - Funding Information:
* Supported by the National Science Foundation, Grant No. 77-09688.
PY - 1981/2
Y1 - 1981/2
N2 - Spitting of group III metal droplets from Knudsen type effusion cells has been found culpable for a genre of problematical macroscopic surface topographical defects observed in the growth of semiconductor films by molecular beam epitaxy. Successful precautions are described which virtually eliminate the problem.
AB - Spitting of group III metal droplets from Knudsen type effusion cells has been found culpable for a genre of problematical macroscopic surface topographical defects observed in the growth of semiconductor films by molecular beam epitaxy. Successful precautions are described which virtually eliminate the problem.
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U2 - 10.1016/0022-0248(81)90314-6
DO - 10.1016/0022-0248(81)90314-6
M3 - Article
AN - SCOPUS:0042646107
SN - 0022-0248
VL - 51
SP - 299
EP - 303
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 2
ER -