Open collaboration based on hands-on access fabrication facility for MEMS

Masayoshi Esashi, Kentaro Totsu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Companies can easily access and utilize a hands-on access fabrication facility in Tohoku University for their prototyping or small-volume production. They can access a lot of technology and know-how accumulated and can be assisted by skilled engineers. More than 200 companies are using the facility.

Original languageEnglish
Title of host publication24th International Display Workshops, IDW 2017
PublisherInternational Display Workshops
Pages1315-1318
Number of pages4
ISBN (Electronic)9781510858992
Publication statusPublished - 2017
Event24th International Display Workshops, IDW 2017 - Sendai, Japan
Duration: 2017 Dec 62017 Dec 8

Publication series

NameProceedings of the International Display Workshops
Volume2
ISSN (Print)1883-2490

Conference

Conference24th International Display Workshops, IDW 2017
Country/TerritoryJapan
CitySendai
Period17/12/617/12/8

Keywords

  • Heterogeneous integration
  • MEMS
  • Microsystems
  • Open collaboration

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