Abstract
In this paper, the relationship between the photodetector outputs and the three-dimensional (3D) positioning of a micro-object in an optical probe is first analyzed based on geometric optics. In the optical model established for the analysis, a collimated laser beam is focused by an objective lens to generate a small beam spot at the focal position and a thin and rectangular micro-object is set close to the focal position. The influence of diffraction of the laser beam is investigated based on a model based on wave optics.
| Original language | English |
|---|---|
| Pages (from-to) | 862-865 |
| Number of pages | 4 |
| Journal | International Journal of Automation Technology |
| Volume | 5 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2011 Nov |
Keywords
- Focused laser beam
- Measurement
- Micro-cutting tool
- Optical sensor
- Positioning