Optical components and actuators for integrated near-field optical data storage

K. Hane, Y. Kanamori, M. Sasaki, J. H. Song

Research output: Contribution to journalConference articlepeer-review


Data-storage using near-field optical microscopy is a promising technology for the breakthrough of high-density optical disk memory since wavelength limit of conventional lens-optics is not applied. We have proposed a MEMS for the near-field optical data storage, which consists of integrated optical micro-probes and a micro media-translation-table. Three-dimensional lithography based on the bulk micromachining using resist spray coater is applied to the integration of waveguide, micro-pinhole tip, cantilever, and photodiode for the MEMS probes. The media-translation-table consists of the inverted scratch drive actuators (inverted SDAs) fabricated by surface micromachining.

Original languageEnglish
Pages (from-to)197-204
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5116 I
Publication statusPublished - 2003
EventSmart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain
Duration: 2003 May 192003 May 21


  • 3D lithography
  • Actuator
  • Micro-probe
  • Micro-stage
  • Optical MEMS


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