Optical constants of superthin gold films for soft x rays

Mihiro Yanagihara; Jianlin Cao; Masaki Yamamoto; Akira Arai; Shigeru Nakayama; Tamaki Mizuide; Takeshi Namioka

doi:10.1063/1.1140863

Optical constants of superthin gold films for soft x rays

Mihiro Yanagihara, Jianlin Cao, Masaki Yamamoto, Akira Arai, Shigeru Nakayama, Tamaki Mizuide, Takeshi Namioka

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6 Citations (Scopus)

Abstract

The optical constants, δ = 1 - n and k, of superthin gold films have been determined from the reflectance data obtained in the soft x-ray region of 60-900 eV. The gold films were prepared to various thicknesses, d = 39-270 Å, by ion-beam sputtering (IBS) and electron-beam evaporation (EB). A plane-parallel slab model with due consideration for the surface and the interfacial roughness was used to analyze the data by least-squares curve fitting. The optical constants derived for the IBS samples definitely show variations in the vicinity of d=100 Å. It is also found that δ of the 201-Å-thick IBS film is smaller by about 7% than that of the 211-Å-thick EB film.

Original language	English
Pages (from-to)	2014-2017
Number of pages	4
Journal	Review of Scientific Instruments
Volume	60
Issue number	7
DOIs	https://doi.org/10.1063/1.1140863
Publication status	Published - 1989
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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title = "Optical constants of superthin gold films for soft x rays",

abstract = "The optical constants, δ = 1 - n and k, of superthin gold films have been determined from the reflectance data obtained in the soft x-ray region of 60-900 eV. The gold films were prepared to various thicknesses, d = 39-270 {\AA}, by ion-beam sputtering (IBS) and electron-beam evaporation (EB). A plane-parallel slab model with due consideration for the surface and the interfacial roughness was used to analyze the data by least-squares curve fitting. The optical constants derived for the IBS samples definitely show variations in the vicinity of d=100 {\AA}. It is also found that δ of the 201-{\AA}-thick IBS film is smaller by about 7% than that of the 211-{\AA}-thick EB film.",

author = "Mihiro Yanagihara and Jianlin Cao and Masaki Yamamoto and Akira Arai and Shigeru Nakayama and Tamaki Mizuide and Takeshi Namioka",

year = "1989",

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journal = "Review of Scientific Instruments",

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T1 - Optical constants of superthin gold films for soft x rays

AU - Yanagihara, Mihiro

AU - Cao, Jianlin

AU - Yamamoto, Masaki

AU - Arai, Akira

AU - Nakayama, Shigeru

AU - Mizuide, Tamaki

AU - Namioka, Takeshi

PY - 1989

Y1 - 1989

N2 - The optical constants, δ = 1 - n and k, of superthin gold films have been determined from the reflectance data obtained in the soft x-ray region of 60-900 eV. The gold films were prepared to various thicknesses, d = 39-270 Å, by ion-beam sputtering (IBS) and electron-beam evaporation (EB). A plane-parallel slab model with due consideration for the surface and the interfacial roughness was used to analyze the data by least-squares curve fitting. The optical constants derived for the IBS samples definitely show variations in the vicinity of d=100 Å. It is also found that δ of the 201-Å-thick IBS film is smaller by about 7% than that of the 211-Å-thick EB film.

AB - The optical constants, δ = 1 - n and k, of superthin gold films have been determined from the reflectance data obtained in the soft x-ray region of 60-900 eV. The gold films were prepared to various thicknesses, d = 39-270 Å, by ion-beam sputtering (IBS) and electron-beam evaporation (EB). A plane-parallel slab model with due consideration for the surface and the interfacial roughness was used to analyze the data by least-squares curve fitting. The optical constants derived for the IBS samples definitely show variations in the vicinity of d=100 Å. It is also found that δ of the 201-Å-thick IBS film is smaller by about 7% than that of the 211-Å-thick EB film.

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Optical constants of superthin gold films for soft x rays

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