Optical interconnect technologies for high-speed VLSI chips using silicon nano-photonics

Keishi Ohashi, Junichi Fujikata, Masafumi Nakada, Tsutomu Ishi, Kenichi Nishi, Hirohito Yamada, Muneo Fukaishi, Masayuki Mizuno, Koichi Nose, Ichiro Ogura, Yutaka Urino, Toshio Baba

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

Optoelectronic and electrooptic elements are integrated on VLSI chips. The junction capacitance of a nano-photodiode is extremely low (<10aF), which permits a high load resistance to be used, resulting in higher output voltage at high frequencies. A ceramic Pb(,ZrTi)O3 film with average crystallite diameter below 20nm has a high electro-optical coefficient (>150pm/V) suitable for on-chip modulators.

Original languageEnglish
Title of host publication2006 IEEE International Solid-State Circuits Conference, ISSCC - Digest of Technical Papers
Pages426+417
Publication statusPublished - 2006
Externally publishedYes
Event2006 IEEE International Solid-State Circuits Conference, ISSCC - San Francisco, CA, United States
Duration: 2006 Feb 62006 Feb 9

Publication series

NameDigest of Technical Papers - IEEE International Solid-State Circuits Conference
ISSN (Print)0193-6530

Other

Other2006 IEEE International Solid-State Circuits Conference, ISSCC
Country/TerritoryUnited States
CitySan Francisco, CA
Period06/2/606/2/9

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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