A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.
|Number of pages||3|
|Journal||SEG Technical Program Expanded Abstracts|
|Publication status||Published - 2001 Jan 1|
ASJC Scopus subject areas
- Geotechnical Engineering and Engineering Geology