Optical interference type micro hydrophone fabricated by micro-machining

Hiroshi Asanuma; Satoshi Hashimoto; Gaku Suzuki; Hiroaki Niitsuma; Masayoshi Esashi

doi:10.1190/1.1816644

Optical interference type micro hydrophone fabricated by micro-machining

Hiroshi Asanuma, Satoshi Hashimoto, Gaku Suzuki, Hiroaki Niitsuma, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.

Original language	English
Pages (from-to)	45-47
Number of pages	3
Journal	SEG Technical Program Expanded Abstracts
Volume	20
Issue number	1
DOIs	https://doi.org/10.1190/1.1816644
Publication status	Published - 2001 Jan 1

ASJC Scopus subject areas

Geotechnical Engineering and Engineering Geology
Geophysics

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10.1190/1.1816644

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Optical interference type micro hydrophone fabricated by micro-machining

Abstract

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