Optical metrology for precision engineering

Wei Gao, Yuki Shimizu

Research output: Book/ReportBook


This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields.

Original languageEnglish
Publisherde Gruyter
Number of pages644
ISBN (Electronic)9783110542363
ISBN (Print)9783110541090
Publication statusPublished - 2021 Nov 22

ASJC Scopus subject areas

  • Engineering(all)
  • Mathematics(all)
  • Chemistry(all)


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