Abstract
The optical sensing system has been proposed for measuring the pressure in the low-vacuum region from the resonance frequency of a photothermal vibration of a thin glass plate. Resonance frequency decreased with increasing pressure in the above region, and its shift was relatively large as compared with that of the quartz oscillator gauge. By using the string-of-beads model, it was clarified that the thin plate is more effective than thick one for obtaining large value of the resonance frequency shift.
| Original language | English |
|---|---|
| Pages (from-to) | 894-898 |
| Number of pages | 5 |
| Journal | Shinku/Journal of the Vacuum Society of Japan |
| Volume | 34 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 1991 |