Optical properties of Au/SiO2 nano-composite films prepared by induction-coil-coupled plasma sputtering

Bo Ping Zhang, Hiroshi Masumoto, Yoshihiro Someno, Takashi Goto

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


Au/SiO2 nano-composite thin films with 3 to 65 vol% Au were prepared by induction-coil-coupled plasma sputtering, and the effect of heat-treatment on the nano-structure and optical property of the films were investigated. The mean diameter of the Au particles in the as-deposited films was about 8 nm and increased from 10 to 30 nm after the heat treatments at 900°C. The optical absorption was greatly improved by the heat-treatment due to the increase of Au particle sizes. At the heat-treatment of 900°C, Au/SiO2 films containing 3 to 65 vol% Au showed absorption peaks at the wavelength of 540 to 560 nm, while no absorption peak was observed in the as-deposited films containing more than 12 vol% Au. The intensity of the absorption peak for the Au/SiO2 films heat treated at 900°C increased with increasing Au content, showing a maximum value around the Au content of 37 vol%.

Original languageEnglish
Pages (from-to)215-219
Number of pages5
JournalMaterials Transactions
Issue number2
Publication statusPublished - 2003 Feb


  • Au/SiO
  • Nano-composite
  • Optical absorption spectra
  • Plasma sputtering
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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