Optical properties of MoSi2/Si multilayer laue lens as nanometer X-ray focusing device

Takahisa Koyama; Satoshi Ichimaru; Takuya Tsuji; Hidekazu Takano; Yasushi Kagoshima; Tadayuki Ohchi; Hisataka Takenaka

doi:10.1143/APEX.1.117003

Optical properties of MoSi₂/Si multilayer laue lens as nanometer X-ray focusing device

Takahisa Koyama, Satoshi Ichimaru, Takuya Tsuji, Hidekazu Takano, Yasushi Kagoshima, Tadayuki Ohchi, Hisataka Takenaka

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

In this study, we designed and fabricated a multilayer Laue lens (MLL) as a hard X-ray focusing device. MoSi₂ and Si were chosen to form the layers by DC magnetron sputtering owing to their superior properties. The optical properties of the MLL were measured at BL24XU of SPring-8 for 20-keV X-rays. In order to confirm the effect of dynamical diffraction, far-field diffraction ¡mages were captured at various incidence angles and depths. The resultant intensity distributions showed a similar structure to those derived through calculations. An almost diffraction-limited size of 28.2 nm was obtained. The maximum local diffraction efficiency was 64.7%.

Original language	English
Pages (from-to)	1170031-1170033
Number of pages	3
Journal	Applied Physics Express
Volume	1
Issue number	11
DOIs	https://doi.org/10.1143/APEX.1.117003
Publication status	Published - 2008 Nov 1
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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abstract = "In this study, we designed and fabricated a multilayer Laue lens (MLL) as a hard X-ray focusing device. MoSi2 and Si were chosen to form the layers by DC magnetron sputtering owing to their superior properties. The optical properties of the MLL were measured at BL24XU of SPring-8 for 20-keV X-rays. In order to confirm the effect of dynamical diffraction, far-field diffraction ¡mages were captured at various incidence angles and depths. The resultant intensity distributions showed a similar structure to those derived through calculations. An almost diffraction-limited size of 28.2 nm was obtained. The maximum local diffraction efficiency was 64.7%.",

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AU - Koyama, Takahisa

AU - Ichimaru, Satoshi

AU - Tsuji, Takuya

AU - Takano, Hidekazu

AU - Kagoshima, Yasushi

AU - Ohchi, Tadayuki

AU - Takenaka, Hisataka

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AB - In this study, we designed and fabricated a multilayer Laue lens (MLL) as a hard X-ray focusing device. MoSi2 and Si were chosen to form the layers by DC magnetron sputtering owing to their superior properties. The optical properties of the MLL were measured at BL24XU of SPring-8 for 20-keV X-rays. In order to confirm the effect of dynamical diffraction, far-field diffraction ¡mages were captured at various incidence angles and depths. The resultant intensity distributions showed a similar structure to those derived through calculations. An almost diffraction-limited size of 28.2 nm was obtained. The maximum local diffraction efficiency was 64.7%.

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Optical properties of MoSi₂/Si multilayer laue lens as nanometer X-ray focusing device

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