TY - JOUR
T1 - Optical scanner based on a NiMnGa thin film microactuator
AU - Kohl, M.
AU - Hoffmann, S.
AU - Liu, Y.
AU - Ohtsuka, M.
AU - Takagi, T.
PY - 2003/10
Y1 - 2003/10
N2 - An optical scanner of 9 × 3 × 5 mm3 size is presented, which is driven by a microactuator of Ni2MnGa. The microactuator is fabricated by magnetron sputtering of a Ni2MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the actuation frequency.
AB - An optical scanner of 9 × 3 × 5 mm3 size is presented, which is driven by a microactuator of Ni2MnGa. The microactuator is fabricated by magnetron sputtering of a Ni2MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the actuation frequency.
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U2 - 10.1051/jp4:20031094
DO - 10.1051/jp4:20031094
M3 - Conference article
AN - SCOPUS:0242456331
SN - 1155-4339
VL - 112 II
SP - 1185
EP - 1188
JO - Journal De Physique. IV : JP
JF - Journal De Physique. IV : JP
T2 - International Conference on Martensitic Transformations
Y2 - 10 June 2002 through 14 June 2002
ER -