TY - GEN
T1 - Optically controllable emitter array with pn-junction integrated Si tip
AU - Tanaka, Yujiro
AU - Miyashita, Hidetoshi
AU - Tomono, Eiichi
AU - Esashi, Masayoshi
AU - Ono, Takahito
PY - 2011
Y1 - 2011
N2 - In this paper, a Si field emitter array with an ability of the optical switching of electron emission has been developed. Each emitter has pn junction at the apex to control emission current optically. Experiments of optical switching of electron emission have been demonstrated successfully. This concept of the optical control of emission can reduce the number of metal wires on the emission device; therefore, a high density emitter array can be achieved.
AB - In this paper, a Si field emitter array with an ability of the optical switching of electron emission has been developed. Each emitter has pn junction at the apex to control emission current optically. Experiments of optical switching of electron emission have been demonstrated successfully. This concept of the optical control of emission can reduce the number of metal wires on the emission device; therefore, a high density emitter array can be achieved.
KW - Electron emission
KW - Emitter array
KW - Microfabrication
KW - Multi electron beam lithography
KW - Optical control
UR - http://www.scopus.com/inward/record.url?scp=80052915334&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052915334&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:80052915334
SN - 9783000350818
T3 - Proceedings - IVNC 2011: 2011 24th International Vacuum Nanoelectronics Conference
SP - 57
EP - 58
BT - Proceedings - IVNC 2011
T2 - 2011 24th International Vacuum Nanoelectronics Conference, IVNC 2011
Y2 - 18 July 2011 through 22 July 2011
ER -