Optimal design of multilayer mirrors for water-window microscope optics

Yurii Uspenskii, Denis Burenkov, Tadashi Hatano, Masaki Yamamoto

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


A small bandwidth of periodic multilayers at wavelengths 2.4-4.4 nm presents problems for the spectral matching of mirrors. This leads to low throughput of a Schwarzschild microscope and its sensitivity to technological errors in layer thickness. We consider two cures for these difficulties: aperiodic coatings and a lateral gradient of layer thickness. Our design of aperiodic multilayers maximizes the throughput of a microscope made at a fixed level of technology. The method includes a new merit function, fast procedure for its minimization, linkage between multilayers and an equation for a lateral gradient of layer thickness. Computation is performed for Sc/Cr coatings at 398 eV. It shows that the aperiodicity makes optics stable to technological errors, while the lateral gradient increases throughput, but enhances sensitivity to the errors. The best results are obtained for aperiodic mirrors with a lateral gradient of thickness, which assure both high microscope throughput and stability to the errors.

Original languageEnglish
Pages (from-to)64-73
Number of pages10
JournalOptical Review
Issue number1
Publication statusPublished - 2007 Jan


  • Aperiodic multilayers
  • Lateral gradient
  • Optimal design
  • Schwarzschild microscope
  • Spectral matching
  • Water-window region


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