@article{c175646113824870bcd6b07beb625994,
title = "Orientation control and domain structure analysis of {100}-oriented epitaxial ferroelectric orthorhombic HfO2-based thin films",
abstract = "Orientation control of {100}-oriented epitaxial orthorhombic 0.07YO1.5-0.93HfO2 films grown by pulsed laser deposition was investigated. To achieve in-plane lattice matching, indium tin oxide (ITO) and yttria-stabilized zirconia (YSZ) were selected as underlying layers. We obtained (100)- and (001)/(010)-oriented films on ITO and YSZ, respectively. Ferroelastic domain formation was confirmed for both films by X-ray diffraction using the superlattice diffraction that appeared only for the orthorhombic symmetry. The formation of ferroelastic domains is believed to be induced by the tetragonal-orthorhombic phase transition upon cooling the films after deposition. The present results demonstrate that the orientation of HfO2-based ferroelectric films can be controlled in the same manner as that of ferroelectric films composed of conventional perovskite-type material such as Pb(Zr, Ti)O3 and BiFeO3.",
author = "Kiliha Katayama and Takao Shimizu and Osami Sakata and Takahisa Shiraishi and Shogo Nakamura and Takanori Kiguchi and Akihiro Akama and Konno, {Toyohiko J.} and Hiroshi Uchida and Hiroshi Funakubo",
note = "Funding Information: This work was partially funded by the MEXT Elements Strategy Initiative to Form Core Research Center, JSPS KAKENHI Grant No. 25889024, and MEXT KAKENHI Grant No. 26106509. Part of this work was also supported by the Center for Integrated Nanotechnology Support at Tohoku University and Nanotechnology Network Project of MEXT of the Japanese Government. The synchrotron radiation experiments were performed at beamlines BL13XU of SPring-8 with the approval of the Japan Synchrotron Radiation Research Institute (JASRI) (Proposal Nos. 2014A1290 and 2014B1779) and BL15XU with the approval of NIMS (Proposal No. 2013B4702, 2014B4704, 2014A4703, 2014B4704, 2015A4702, and 2015B4702). Publisher Copyright: {\textcopyright} 2016 AIP Publishing LLC.",
year = "2016",
month = apr,
day = "7",
doi = "10.1063/1.4945029",
language = "English",
volume = "119",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "13",
}