Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions

S. Yoshimura; Y. Narisawa; T. Nozawa; M. Tsunoda; M. Takahashi

doi:10.1109/intmag.2005.1463672

Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions

S. Yoshimura, Y. Narisawa, T. Nozawa, M. Tsunoda, M. Takahashi

Research Center for Green X-Tech

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	INTERMAG ASIA 2005
Subtitle of host publication	Digests of the IEEE International Magnetics Conference
Publisher	IEEE Computer Society
Pages	244
Number of pages	1
ISBN (Print)	0780390091, 9780780390096
DOIs	https://doi.org/10.1109/intmag.2005.1463672
Publication status	Published - 2005
Event	INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference - Nagoya, Japan Duration: 2005 Apr 4 → 2005 Apr 8

Publication series

Name	INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

Conference

Conference	INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference
Country/Territory	Japan
City	Nagoya
Period	05/4/4 → 05/4/8

Access to Document

10.1109/intmag.2005.1463672

Cite this

Yoshimura, S., Narisawa, Y., Nozawa, T., Tsunoda, M., & Takahashi, M. (2005). Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions. In INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference (pp. 244). Article CA 11 (INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference). IEEE Computer Society. https://doi.org/10.1109/intmag.2005.1463672

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title = "Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions",

author = "S. Yoshimura and Y. Narisawa and T. Nozawa and M. Tsunoda and M. Takahashi",

year = "2005",

doi = "10.1109/intmag.2005.1463672",

language = "English",

isbn = "0780390091",

series = "INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference",

publisher = "IEEE Computer Society",

pages = "244",

booktitle = "INTERMAG ASIA 2005",

address = "United States",

note = "INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference ; Conference date: 04-04-2005 Through 08-04-2005",

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Yoshimura, S, Narisawa, Y, Nozawa, T, Tsunoda, M & Takahashi, M 2005, Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions. in INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference., CA 11, INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference, IEEE Computer Society, pp. 244, INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference, Nagoya, Japan, 05/4/4. https://doi.org/10.1109/intmag.2005.1463672

Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions. / Yoshimura, S.; Narisawa, Y.; Nozawa, T. et al.
INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference. IEEE Computer Society, 2005. p. 244 CA 11 (INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions

AU - Yoshimura, S.

AU - Narisawa, Y.

AU - Nozawa, T.

AU - Tsunoda, M.

AU - Takahashi, M.

PY - 2005

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M3 - Conference contribution

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T3 - INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

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BT - INTERMAG ASIA 2005

PB - IEEE Computer Society

T2 - INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

Y2 - 4 April 2005 through 8 April 2005

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Yoshimura S, Narisawa Y, Nozawa T, Tsunoda M, Takahashi M. Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions. In INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference. IEEE Computer Society. 2005. p. 244. CA 11. (INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference). doi: 10.1109/intmag.2005.1463672

Oxidation process of metal films by using high concentration ozone in magnetic tunnel junctions

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