In this paper, we have proposed, fabricated and characterized a parallel electron beam micro-column with single-stranded carbon nanotube (CNT) filed emitters. The integrated micro-column consists of a self-aligned CNT field emitter array (FEA), and a multi-layered electrostatic Si focusing lens array. In our design, the emitters, gate and electrostatic lens array are electrically isolated, and each source can be controlled individually. Electron emission performance of the fabricated CNT/Si emitter was characterized. The best turn-on fields, defined as the field required to generate an emission current of 1 nA, were approximately 6 V. When applying a gate voltage of 100 V, a 110 nA anode current is measured. It is seen that CNT/Si emitter showed low threshold voltage; however, the emission current fluctuation was high during high voltage operation.