Abstract
To measure the parallelism error between the Z-slide axis and the spindle axis of the ultra precision diamond turning machine which has a T-base design with a spindle, an X-slide and a Z-slide, the rotating reversal method is carried out. Two capacitance probes are employed for the measurement of the cylinder workpiece(for rotating) which was installed on the spindle. The straightness error of the Z-slide of the ultra-precision diamond turning machine was measured to be about 100 nm and parallelism error was evaluated to be approximately 0.84 arc-second of the Z-slide by the rotating reversal method over a movement range of 126 mm.
| Original language | English |
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| Publication status | Published - 2009 |
| Event | 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan Duration: 2009 Dec 2 → 2009 Dec 4 |
Conference
| Conference | 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 |
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| Country/Territory | Japan |
| City | Osaka |
| Period | 09/12/2 → 09/12/4 |
Keywords
- Error motion
- Machine tool
- Measurement
- Parallelism
- Reversal method