TY - GEN
T1 - Parametrically driven resonant micro-mirror scanner with tunable springs
AU - Kim, Jinhyeok
AU - Kawai, Yusuke
AU - Inomata, Naoki
AU - Ono, Takahito
PY - 2013
Y1 - 2013
N2 - In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.
AB - In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.
UR - http://www.scopus.com/inward/record.url?scp=84875466045&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84875466045&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474308
DO - 10.1109/MEMSYS.2013.6474308
M3 - Conference contribution
AN - SCOPUS:84875466045
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 580
EP - 583
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -