Fingerprint
Dive into the research topics of 'Patterning high aspect silicon pillars on cantilever by metal assisted chemical etching for humidity sensing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Patterning high aspect silicon pillars on cantilever by metal assisted chemical etching for humidity sensing
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)