TY - GEN
T1 - Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror
AU - Sasaki, Minoru
AU - Yuuki, Shinya
AU - Hane, Kazuhiro
PY - 2005
Y1 - 2005
N2 - A micromirror device is developed realizing the targe-rotation and the low-voltage driving (obtained maximum value is 8.6 degrees at 5 V). The thin film torsion bars, which consist of SiN and Au/Cr films, contribute to this performance. Inside the torsion bar, the tension is included for generating the compliance in the mirror rotation and stiffness in other movements. The performance of the torsion bar is investigated.
AB - A micromirror device is developed realizing the targe-rotation and the low-voltage driving (obtained maximum value is 8.6 degrees at 5 V). The thin film torsion bars, which consist of SiN and Au/Cr films, contribute to this performance. Inside the torsion bar, the tension is included for generating the compliance in the mirror rotation and stiffness in other movements. The performance of the torsion bar is investigated.
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UR - http://www.scopus.com/inward/citedby.url?scp=33745937195&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2005.1540112
DO - 10.1109/OMEMS.2005.1540112
M3 - Conference contribution
AN - SCOPUS:33745937195
SN - 0780392787
SN - 9780780392786
T3 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
SP - 129
EP - 130
BT - IEEE/LEOS Optical MEMS 2005
T2 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Y2 - 1 August 2005 through 4 August 2005
ER -