TY - JOUR
T1 - Performance of the post-focusing mirror system at the reflectometry beamline BL-11D of the Photon Factory
AU - Hatano, Tadashi
AU - Aihara, Shogaku
AU - Uchida, Kentaro
AU - Tsuru, Toshihide
PY - 2013
Y1 - 2013
N2 - Beamline BL-11D of the Photon Factory was recently opened for the characterization of extreme-ultraviolet and soft X-ray optical components. For reflectometry of multilayers for soft X-ray microscope optics, a small focus size on the sample surface matching the small acceptances of the curved multilayer samples is required. The post-focusing mirror system of BL-11D is composed of horizontally and vertically focusing elliptical mirrors. The performance was evaluated by microscopic beam profile observation, by a knife-edge scan test, and by the Ronchi test. The FWHM beam size was 120 μm (H) × 30 μm (V) with an insignificant spherical aberration, which is smaller than the requirement.
AB - Beamline BL-11D of the Photon Factory was recently opened for the characterization of extreme-ultraviolet and soft X-ray optical components. For reflectometry of multilayers for soft X-ray microscope optics, a small focus size on the sample surface matching the small acceptances of the curved multilayer samples is required. The post-focusing mirror system of BL-11D is composed of horizontally and vertically focusing elliptical mirrors. The performance was evaluated by microscopic beam profile observation, by a knife-edge scan test, and by the Ronchi test. The FWHM beam size was 120 μm (H) × 30 μm (V) with an insignificant spherical aberration, which is smaller than the requirement.
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U2 - 10.1088/1742-6596/463/1/012010
DO - 10.1088/1742-6596/463/1/012010
M3 - Conference article
AN - SCOPUS:84891282319
SN - 1742-6588
VL - 463
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012010
T2 - 11th International Conference on X-Ray Microscopy, XRM 2012
Y2 - 5 August 2012 through 10 August 2012
ER -