TY - JOUR
T1 - Perpendicular magnetic anisotropy of Fe-Cr-N films prepared by DC reactive sputtering
AU - Peng, Dong Liang
AU - Sumiyama, Kenji
AU - Konno, Toyohiko J.
AU - Suzuki, Kenji
PY - 1997
Y1 - 1997
N2 - Fe-Cr-N ternary films prepared by DC magnetron facing-target sputtering show perpendicular magnetic anisotropy. Upon appropriate adjustment of the chemical composition and deposition parameters, saturation magnetization of 0.37 0.5 Wb/m2 (300-400 emu/cm3) and perpendicular coercivity of 6.4×104-8.8×104 A/m (800-1100 Oe) are detected in the Fe-Cr-N films. X-ray diffraction measurements reveal that the films with large perpendicular anisotropy generally consist of the fine-grain α-Fe(Cr) phase and the γ′-(Fe, Cr)4Nx (x<1) phase having a pronounced (200) texture. By TEM observation, we found that the nonmagnetic γ′-(Fe, Cr)4Nx phase displays columnar growth and that the small ferromagnetic α-Fe(Cr) grains of about 2-20 nm diameter are located at grain boundaries of γ′-(Fe, Cr)4Nx grains in the Fe71Cr20N9 film.
AB - Fe-Cr-N ternary films prepared by DC magnetron facing-target sputtering show perpendicular magnetic anisotropy. Upon appropriate adjustment of the chemical composition and deposition parameters, saturation magnetization of 0.37 0.5 Wb/m2 (300-400 emu/cm3) and perpendicular coercivity of 6.4×104-8.8×104 A/m (800-1100 Oe) are detected in the Fe-Cr-N films. X-ray diffraction measurements reveal that the films with large perpendicular anisotropy generally consist of the fine-grain α-Fe(Cr) phase and the γ′-(Fe, Cr)4Nx (x<1) phase having a pronounced (200) texture. By TEM observation, we found that the nonmagnetic γ′-(Fe, Cr)4Nx phase displays columnar growth and that the small ferromagnetic α-Fe(Cr) grains of about 2-20 nm diameter are located at grain boundaries of γ′-(Fe, Cr)4Nx grains in the Fe71Cr20N9 film.
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U2 - 10.1143/jjap.36.l479
DO - 10.1143/jjap.36.l479
M3 - Article
AN - SCOPUS:0031118899
SN - 0021-4922
VL - 36
SP - L479-L481
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 4 B
ER -